C. M. Tan, Z. Gan, K. Prasad, and D. H. Zhang. “A novel technique to re-construct three dimensional void in passivated metal interconnects,” in Materials Research Society Spring Meeting, 2003.
C. M. Tan, Z. Gan, K. Prasad, and D. H. Zhang. “A novel technique to re-construct three dimensional void in passivated metal interconnects,” in Materials Research Society Spring Meeting, 2003.