A comprehensive predictive maintenance model for equipment maintenance in the semiconductor industry CONFERENCE PAPERS A comprehensive predictive maintenance model for equipment maintenance in the semiconductor industry Read More »
A cost model for the predictive maintenance policy of a multi-state system CONFERENCE PAPERS A cost model for the predictive maintenance policy of a multi-state system Read More »
Predictive maintenance and its impact to business decision (invited) CONFERENCE PAPERS Predictive maintenance and its impact to business decision (invited) Read More »
Maintenance policy for predictive maintenance (invited) CONFERENCE PAPERS Maintenance policy for predictive maintenance (invited) Read More »
Stress migration reliability of wide Cu interconnects with Gouging Vias CONFERENCE PAPERS Stress migration reliability of wide Cu interconnects with Gouging Vias Read More »
Is electron wind force the sole driving force in electromingration of ULSI interconnection? (invited) CONFERENCE PAPERS Is electron wind force the sole driving force in electromingration of ULSI interconnection? (invited) Read More »
Extrapolation of electromigration reliability assessment from accelerated test for submicron interconnect via structure CONFERENCE PAPERS Extrapolation of electromigration reliability assessment from accelerated test for submicron interconnect via structure Read More »
Effect of vacuum break after the barrier layer deposition on the electromigratioin performance of aluminum based line interconnects CONFERENCE PAPERS Effect of vacuum break after the barrier layer deposition on the electromigratioin performance of aluminum based line interconnects Read More »
Effect of test condition and stress free temperature on the electromigration failure of Cu dual damascene submicron interconnect line-via structures CONFERENCE PAPERS Effect of test condition and stress free temperature on the electromigration failure of Cu dual damascene submicron interconnect line-via structures Read More »
Feasibility of capacitive coupling voltage contrast (CCVC) for the failure analysis of advanced printed circuit board CONFERENCE PAPERS Feasibility of capacitive coupling voltage contrast (CCVC) for the failure analysis of advanced printed circuit board Read More »