Finite element modeling of residual mechanical stress in partial SOI structure due to wafer bonding processing CONFERENCE PAPERS Finite element modeling of residual mechanical stress in partial SOI structure due to wafer bonding processing Read More »
Low temperature wafer bonding in medium vacuum CONFERENCE PAPERS Low temperature wafer bonding in medium vacuum Read More »
Silicon-to-silicon wafer bonding by tempered sol-gel intermediate layer CONFERENCE PAPERS Silicon-to-silicon wafer bonding by tempered sol-gel intermediate layer Read More »
Low temperature silicon wafer bonding by sol-gel processing JOURNAL PAPERS Low temperature silicon wafer bonding by sol-gel processing Read More »
Silicon-to-silicon wafer bonding efficiency by sol-gel process CONFERENCE PAPERS Silicon-to-silicon wafer bonding efficiency by sol-gel process Read More »
Influence of applied load on wafer bonding in vacuum CONFERENCE PAPERS Influence of applied load on wafer bonding in vacuum Read More »
Influence of plasma treatment and cleaning on vacuum wafer bonding CONFERENCE PAPERS Influence of plasma treatment and cleaning on vacuum wafer bonding Read More »
Low temperature silicon wafer bonding by sol-gel processing CONFERENCE PAPERS Low temperature silicon wafer bonding by sol-gel processing Read More »
Influence of super-thin oxide layer on device fabricated on partial SOI substrate CONFERENCE PAPERS Influence of super-thin oxide layer on device fabricated on partial SOI substrate Read More »